Introducing the ORion II new series, NV7392S flat panel lon implantation system

International Display Manufacturing Conference and Exhibition, IDMC'05

Volumn , Issue , 2005, Pages 161-164

  Sato, Masateru ^a   Suzuki, Toshiharu ^a   Isobe, Eiji ^a   Murata, Hirohiko ^a   Yoshida, Kazuya ^a   Nishihara, Tatsuo ^a   Inada, Kouji ^a  

^a Sumitomo Eaton Nova Corp   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; DOPING (ADDITIVES); FLAT PANEL DISPLAYS; LIGHT EMITTING DIODES; THROUGHPUT;

DOSE-UNIFORMITY; HYDROGEN REDUCTION SYSTEM;

ION IMPLANTATION;

EID: 33644649125     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

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2. J. Blake, et al. Solid State Technology, May 1997
3. K. Chen, et al., Proc. of IIT1998, pp.1218, 1999
4. M. Sato, et al., Proc. of IIT2002, pp.383-386, 2002