A rapid annealing system for high performance LTPS TFTs

International Display Manufacturing Conference and Exhibition, IDMC'05

Volumn , Issue , 2005, Pages 639-641

  Morita, Masaru ^a   Hashimoto, Kouji ^a   Mizuno, Masayuki ^a   Kawasaki, Yoshinori ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL ACTIVATION; COOLING; GLASS; LOW TEMPERATURE EFFECTS; SILICONES;

FOR LOW-TEMPERATURE POLY SILICONE (LTPS) TFT; PRE-COMPRESSION PROCESSING;

THIN FILM TRANSISTORS;

EID: 33644643048     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)