Fabrication of Si thin-films with arrays of long and narrow grains for next generation TFTs

IDW/AD'05 - Proceedings of the 12th International Display Workshops in Conjunction with Asia Display 2005

Volumn , Issue 2, 2005, Pages 1219-1220

  Katou, T ^a   Taniguchi, Y ^a   Hiramatsu, M ^a   Azuma, K ^a   Matsumura, M ^a  

^a Advanced LCD Technologies Development Center Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; GRAIN GROWTH; PHASE MODULATION; SILICON; THIN FILM TRANSISTORS;

GROWTH DIRECTION; PHASE-MODULATED EXCIMER-LASER-ANNEALING (PMELA); SI FILMS; THINNING;

THIN FILMS;

EID: 33644591929     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. M. Matsumura, J. Surf. Sci. Soc. Jpn. 21(2000).