Manufacture and development of multilayer diffraction gratings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5991, Issue , 2005, Pages

  Keck, J ^a   Oliver, J B ^a   Kessler, T J ^a   Huang, H ^a   Barone, J ^a   Hettrick, J ^a   Rigatti, A L ^a   Hoover, T ^a   Marshall, K L ^a   Schmid, A W ^a   Kozlov, A ^a   Kosc, T Z ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

Author keywords

Dielectric gratings; MLD gratings; Reactive etching; RIBE

Indexed keywords

DIELECTRIC GRATINGS; MLD GRATINGS; REACTIVE ETCHING;

DIELECTRIC MATERIALS; EXPLOSIVES; LASER DAMAGE; MULTILAYERS; REACTIVE ION ETCHING;

DIFFRACTION GRATINGS;

EID: 33644586584     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.638819     Document Type: Conference Paper

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