Mesoporous silicon-based miniature fuel cells for nomadic and chip-scale systems

Microsystem Technologies

Volumn 12, Issue 4, 2006, Pages 330-334

  Pichonat, Tristan ^a,b   Gauthier Manuel, Bernard ^a  

^a FEMTO ST INSTITUTE   (France)

^b INSTITUT D ELECTRONIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP SCALE PACKAGES; CURRENT DENSITY; ETCHING; FABRICATION; MEMBRANES; SILICON;

MEMBRANE ETCHING PROCESSES; METAL SPUTTERINGS; OPEN CIRCUIT VOLTAGE; WET ETCHING;

FUEL CELLS;

EID: 33644555838     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0072-0     Document Type: Article

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