Formation of diamond-like carbon based double-layer film on Ti-6Al-4V substrate by ionization deposition

Materials Transactions

Volumn 45, Issue 5, 2004, Pages 1601-1606

  Mano, Tsuyoshi ^a   Sugiyama, Osamu ^a   Shibuya, Yoshio ^a   Nakayama, Hiroshi ^a   Takai, Osamu ^b  

^a Fuji Industrial Research Institute of Shizuoka Prefecture   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

Adhesion; Diamond like carbon (DLC); Double layer film; Graded composition; Ionization deposition; Low friction; Titanium alloy; Wear resistance; X ray photoelectron spectroscopy

Indexed keywords

ADHESION; ANODES; BENZENE; COMPOSITION; DENSITY OF GASES; DEPOSITION; ION BOMBARDMENT; SILICON COMPOUNDS; SUBSTRATES; THICKNESS MEASUREMENT; TITANIUM ALLOYS; WEAR RESISTANCE;

DOUBLE-LAYER FILMS; GRADED COMPOSITIONS; IONIZATION DEPOSITION; LOW FRICTIONS;

DIAMOND LIKE CARBON FILMS;

EID: 3342959887     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.45.1601     Document Type: Article

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