Methylchloride adsorbed on Si(0 0 1): An ab initio study

Applied Surface Science

Volumn 234, Issue 1-4, 2004, Pages 155-161

  Preuss, M ^a   Schmidt, W G ^a   Seino, K ^a   Bechstedt, F ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Adsorption; Alkyl halides; DFT; Silicon surface

Indexed keywords

ADSORPTION; CHARGE TRANSFER; CHEMICAL BONDS; DESORPTION; ELECTRONIC PROPERTIES; ELECTROSTATICS; ETCHING; MICROELECTRONICS; OPTIMIZATION; ORGANIC COMPOUNDS; PROBABILITY DENSITY FUNCTION;

ALKYL HALIDES; DENSITY FUNCTIONAL THEORY (DFT); MICROELECTRONIC DEVICES; SILICON SURFACES;

SILICON;

EID: 3342934984     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.05.041     Document Type: Conference Paper

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