High-fill-factor adaptive optics mirrors with independent piston, tip and tilt controls

Journal of Micromechanics and Microengineering

Volumn 16, Issue 3, 2006, Pages

  Greywall, Dennis S ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ADAPTIVE OPTICS; OPTICAL DESIGN; PISTONS; SURFACE PROPERTIES;

HIGH-FILL-FACTOR; NOVEL ACTUATORS; TILT CONTROLS;

MIRRORS;

EID: 33344456307     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/16/3/N01     Document Type: Article

References (5)

1. Tyson R K 1991 Principles of Adaptive Optics (San Diego, CA: Academic)
2. Sweatt W C 2005 Reduction of Zernike wavefront errors using a micromirror array Opt. Eng. 44 098001
3. Nasiri S S 2002 Microelectromechanical mirror and mirror array US Patent 6480320 B2
4. Jung I W, Krishnamoorthy U and Solgaard O 2004 High fill-factor two-axis gimbaled tip-tilt-piston micromirror array actuated by self-aligned vertical electrostatic comb drives Proc. 2004 IEEE/LEOS Int. Conf. on Optical MEMS (Takamatsu, Kagawa, Japan, August 2004) pp 208-9
5. Roark R J and Young W C 1975 Formulas for Stress and Strain (New York: McGraw-Hill)