SU 8 used as optical waveguide in integrated optical microsensor for biological applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5972, Issue , 2005, Pages

  Muller, Raluca ^a   Obreja, P ^a   Kusko, M ^a   Esinenco, D ^a   Tibeica, C ^a   Conache, G ^a   Buia, L ^a   Apostol, D ^b   Damian, V ^b   Mateescu, M ^c   Diaconu, Mirela ^c   Moldovan, Lucia ^c  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b NATIONAL INSTITUTE FOR LASER   (Romania)

^c NATIONAL INSTITUTE OF RESEARCH AND DEVELOPMENT FOR BIOLOGICAL SCIENCES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED OPTICS; MEDICAL APPLICATIONS; MICROMACHINING; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY;

CHANNEL OPTICAL WAVEGUIDES.; HIGHER ORDER MODES; MICROMACHINED STRUCTURES;

FIBER OPTIC SENSORS;

EID: 33244497568     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.639745     Document Type: Conference Paper

References (6)

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