Modeling and alleviating instability in a mems vertical comb drive using a progressive linkage

Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005

Volumn 7 A, Issue , 2005, Pages 511-517

  Bronson, Jessica R ^a   Wiens, Gloria J ^a   Allen, James J ^b  

^a UNIVERSITY OF FLORIDA   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; DEGREES OF FREEDOM (MECHANICS); DRIVES; ELECTROSTATICS; OPTICAL SYSTEMS;

ELECTROSTATIC MODEL; ELECTROSTATIC PERFORMANCE; VERTICAL COMB DRIVE;

MICROELECTROMECHANICAL DEVICES;

EID: 33244478303     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/detc2005-84217     Document Type: Conference Paper

References (7)

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2. D. Hah, P.R. Patterson, H.D. Nguyen, H. Toshiyoshi, and M.C. Wu, "Theory and Experiments of Angular Vertical Comb-Drive Actuators for Scanning Micromirrors", IEEE Journal of Selected Topics in Quantum Electronics, Vol. 10, No. 3, May/June 2004, pp. 505-513.
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5. D. Hah, H. Toshiyoshi, and M.C. Wu, "Design of Electrostatic Actuators for MOEMS Applications", Design, Test, Integration and Packaging of MEMS/MOEMS 2002, Proceedings of SPIE, Vol. 4755, pp. 200-207.
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7. Sandia National Laboratories, http://www.sandia.gov/mstc/ technologies/micromachines/techinfo/technologies/summit5.html, February 10, 2005.