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Volumn 5972, Issue , 2005, Pages
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Conoscopic holography
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Author keywords
3D measurement; Conoscopic; Focusing; In line inspection; Metrology; Quality control
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Indexed keywords
CRYSTAL STRUCTURE;
FOCUSING;
LASER BEAMS;
LIGHT INTERFERENCE;
LIGHT POLARIZATION;
MEASUREMENTS;
QUALITY CONTROL;
REVERSE ENGINEERING;
3D MEASUREMENT;
CONOSCOPIC;
IN-LINE INSPECTION;
IN-PROCESS INSPECTION;
HOLOGRAPHY;
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EID: 33244473453
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.639169 Document Type: Conference Paper |
Times cited : (4)
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References (10)
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