Micro-Optics: Manufacturing and characterization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5965, Issue , 2005, Pages

  Voelkel, R ^a   Eisner, M ^a   Weible, K J ^a  

^a SUSS MICROOPTICS SA   (Switzerland)

Author keywords

MEMS; Micro optics; Microlens; Microlens arrays; Microoptics; MOEMS; Optics, micro technology

Indexed keywords

DEPOSITION; LENSES; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; SPUTTERING;

MEMS; MICROLENS; MICROLENS ARRAYS; OPTICS, MICRO-TECHNOLOGY;

MICROOPTICS;

EID: 33244469282     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.624133     Document Type: Conference Paper

References (0)