Fabrication of a one-dimensional array of nanopores horizontally aligned on a Si substrate

Journal of Nanoscience and Nanotechnology

Volumn 5, Issue 10, 2005, Pages 1745-1748

  Zhang, Hongguo ^a   Chen, Zhi ^a   Li, Tianxiang ^a   Saito, Kozo ^a  

^a UNIVERSITY OF KENTUCKY   (United States)

Author keywords

1 D array; AAO; Anodization; Nanopore arrays; Nanotemplate

Indexed keywords

1-D ARRAY; AAO; NANOPORE ARRAYS; NANOTEMPLATE;

ANODIC OXIDATION; ARRAYS; INTEGRATED CIRCUITS; INTERFACES (COMPUTER); SCANNING ELECTRON MICROSCOPY; SILICON;

NANOSTRUCTURED MATERIALS;

ALUMINUM OXIDE; NANOMATERIAL; SILICON;

ANISOTROPY; ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; CRYSTALLIZATION; ELECTROPLATING INDUSTRY; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PARTICLE SIZE; POROSITY; SURFACE PROPERTY; ULTRASTRUCTURE;

ALUMINUM OXIDE; ANISOTROPY; CRYSTALLIZATION; ELECTROPLATING; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; NANOSTRUCTURES; NANOTECHNOLOGY; PARTICLE SIZE; POROSITY; SILICON; SURFACE PROPERTIES;

EID: 32944472165     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2005.157     Document Type: Article

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