Investigation on silicon-glass electrostatic bonding time

Sensors and Actuators, A: Physical

Volumn 127, Issue 1, 2006, Pages 194-199

  Rongyan, Chuai ^a,b   Xiaowei, Liu ^a   Weiping, Chen ^a   Minghao, Song ^a   Yibo, Liu ^c  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b SHENYANG UNIVERSITY OF TECHNOLOGY   (China)

^c HEILONGJIANG UNIVERSITY   (China)

Author keywords

Anodic bonding; Bonding strength; Critical time; Measuring method

Indexed keywords

ANODIC BONDING; BONDING STRENGTH; CRITICAL TIME; MEASURING METHOD;

ANODES; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ERROR ANALYSIS; MEASUREMENT THEORY;

GLASS BONDING;

EID: 32844471846     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.11.054     Document Type: Article

References (11)

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