Design and modeling of a MEMS pico-Newton loading/sensing device

Sensors and Actuators, A: Physical

Volumn 127, Issue 1, 2006, Pages 155-162

  Samuel, B A ^a   Desai, A V ^a   Haque, M A ^a,b  

^a The Pennsylvania State University   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Compliant mechanism; Displacement amplification; Micro electro mechanical systems (MEMS) force sensor; Non linear stiffness; Post buckling phenomenon

Indexed keywords

BUCKLING; CARBON NANOTUBES; OPTICAL DESIGN; OPTICAL SENSORS; SCANNING ELECTRON MICROSCOPY; SILICON;

COMPLIANT MECHANISM; DISPLACEMENT AMPLIFICATION; MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) FORCE SENSOR; NON-LINEAR STIFFNESS; POST BUCKLING PHENOMENON;

MICROELECTROMECHANICAL DEVICES;

EID: 32844471516     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.11.018     Document Type: Article

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