Design and analysis of a novel tunable optical filter

Microelectronics Journal

Volumn 37, Issue 4, 2006, Pages 302-307

  Eliahou Niv, S ^a   Dahan, R ^a   Golan, G ^a  

^a HOLON INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

DWDM demultiplexer; Optical tunable filter; Thin film tilt interference filter

Indexed keywords

ACTUATORS; ELECTROSTATICS; FINITE ELEMENT METHOD; OPTICAL DESIGN; PIEZOELECTRIC DEVICES; THIN FILMS;

DWDM DEMULTIPLEXER; OPTICAL TUNABLE-FILTER; THIN-FILM TILT INTERFERENCE FILTER;

OPTICAL FILTERS;

EID: 32544439674     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.05.018     Document Type: Article

References (9)

1. S. Eliahou-Niv, Overview on the next generation of electro-optical components based on MEMS technology. Communication 2002 Conference, Tel-Aviv, May 2002.
2. M. Madou Fundamentals of microfabrication 1997 CRC Press Boca Raton, FL
3. A. Seifert, S. Eliahou-Niv, D. Greenblatt, and I. Wygnanski On the use of piezoelectric actuators for airfoil separation control AIAA J 36 8 1998
4. S. Eliahou-Niv Active actuators for aerodynamic flow control. Micro-electro-mechanical-systems 1999 The Israel Academy of Science & Humanities Zichron Yaacov, Israel
5. S.D. Senturia, Microsystem Design. Kluwer Academic Publishers, Dordrecht, The Netherlands, 2005.
6. O. Shay, S. Eliahou-Niv, D. Rubin, M. Sluvatin, and A. Andrusier Multidimensional graph representations for MEMS and their applications ISRAMEMS, the First National Conference of the Israeli MOEMS Society, 2002 2002 Haifa Israel
7. S. Eliahou-Niv, Y. Artstein, and R. Dahan Buckling beam spring design & analysis Mems Day in Israel 2001 Technion-Israel Institute of Technology Haifa, Israel p. 5
8. A. Macleod, Thin Film Optical Filters, third ed., 2001 (chapter 1).
9. B.E.A. Saleh, and M.C. Teich Fundamentals of Photonics 1991 Wiley New York pp. 193-235