Characteristics of multilayer piezoelectric actuator made of high Q material for application to ultrasonic linear motor

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11 B, 2002, Pages 7144-7148

  Funakubo, Tomoki ^a,b   Tomikawa, Yoshiro ^b  

^a OLYMPUS CORPORATION   (Japan)

^b YAMAGATA UNIVERSITY   (Japan)

Author keywords

Hard material; Low voltage drive; Multilayer piezoelectric actuator; Piezoelectric vibration; Soft material; Ultrasonic linear motor; Ultrasonic motor

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; PIEZOELECTRIC MATERIALS; ULTRASONIC WAVES; VIBRATORS;

HARD MATERIAL; LOW VOLTAGE DRIVE; MULTILAYER PIEZOELECTRIC ACTUATOR; PIEZOELECTRIC VIBRATION; SOFT MATERIAL; ULTRASONIC LINEAR MOTOR; ULTRASONIC MOTOR;

LINEAR MOTORS;

EID: 32444445582     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.7144     Document Type: Article

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