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Volumn 41, Issue 11 B, 2002, Pages 6882-6885
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Preparation of Ag-alloy top-electrode for ferroelectric Pb(Zr, Ti)O 3 films under various atmospheres
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Author keywords
Ag alloy; CSD; Electrode; Hydrogen annealing; Pt; PZT film
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Indexed keywords
ANNEALING;
ELECTRODES;
FERROELECTRIC DEVICES;
SILVER ALLOYS;
AG-ALLOY;
CSD;
HYDROGEN ANNEALING;
PZT FILM;
THIN FILMS;
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EID: 32444435385
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/JJAP.41.6882 Document Type: Article |
Times cited : (7)
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References (15)
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