Low loss intermediate-frequency resonator filter using shear horizontal type leaky surface acoustic wave on α-phase heavy metal film/quartz

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 5 B, 2004, Pages 3047-3049

  Kadota, Michio ^a   Takata, Eiichi ^a   Nakagawa, Masatoshi ^a   Tose, Makoto ^a   Yamamoto, Yasuji ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

Low loss; Resistivity; Resonator filter; SH LSAW; phase metal film

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ELECTRODES; HEAVY METALS; QUARTZ; SPUTTERING; TRANSDUCERS;

LOW LOSS; RESISTIVITY; RESONATOR FILTER; SHEAR HORIZONTAL (SH)-LEAKY SURFACE ACOUSTIC WAVE (LSAW); Α-PHASE METAL FILM;

RESONATORS;

EID: 3242813691     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.3047     Document Type: Conference Paper

References (10)

1. M. Kadota, T. Yoneda, K. Fujimoto, T. Nakao and E. Takata: Proc. 30th Electro-Mechanical Symp., Chiba (2001) p. 187 [in Japanese].
2. M. Kadota, T. Yoneda, K. Fujimoto, T. Nakao and E. Takata: Jpn. J. Appl. Phys. 40 (2001) 3718.
3. M. Kadota, T. Yoneda, K. Fujimoto, T. Nakao and E. Takata: Proc. IEEE Ultrason. Symp. (2001) p. 65.
4. M. Kadota, J. Ago, H. Horiuchi and M. Ikeura: Trans. IEICE. Jpn. J86 (2003) 292 [in Japanese].
5. Murata MFG. Catalog: Cat. No. p35E-2 (1998) p. 25 [in Japanese].
6. EPCOS SAW Component Data Sheet: B-4829, B-4833, B-4839, OFW EM EU (May 5, 1999).
7. M. Morimoto, Y. Yamamoto and T. Watanabe: Proc. 14th Electro-Mechanical Symp. (Tokyo, 1985) p. 7 [in Japanese].
8. H. Kobayashi: Sputtering Gijyutu (Nikkankogyosinbun, Tokyo, 1992) p. 117 [in Japanese].
9. Onoda: Pub. Unexamined Japan Patent Appl. Hei5-109651 (1993) [in Japanese].
10. Y. Yamamoto, H. Kawahara, N. Sakairi, Y. Takahashi, R. Kajihara, T. Tsuda and S. Yoshimoto: Proc. IEEE Ultrason. Symp. (1999) p. 333.