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Volumn 43, Issue 5 B, 2004, Pages 3071-3075

Submicrometer-order displacement measurements using an air-coupled ultrasonic transducer at frequencies of 40 and 400 kHz

Author keywords

Air coupled ultrasonic; Noncontact displacement measurement; Phase differences; Reflection mode; Submicrometer order

Indexed keywords

ACOUSTIC IMPEDANCE; ATTENUATION; CAPACITANCE; INTERFEROMETERS; PHASE SHIFT; PIEZOELECTRICITY;

AIR-COUPLED ULTRASONIC; NONCONTACT DISPLACEMENT MEASUREMENT; PHASE DIFFERENCES; REFLECTION MODE; SUBMICROMETER-ORDER;

ULTRASONIC TRANSDUCERS;

EID: 3242753462 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.3071 Document Type: Conference Paper

Times cited : (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.