Multilayer diffraction gratings

Crystallography Reports

Volumn 49, Issue SUPPL. 1, 2004, Pages

  Kondakov, A S ^a   Roshchupkin, D V ^a  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; MULTILAYERS; OPTICAL PROPERTIES; X RAYS;

LIFT-OFF TECHNIQUE; MULTILAYER DIFFRACTION GRATINGS; X-RAY OPTICAL PROPERTIES;

DIFFRACTION GRATINGS;

EID: 3242683647     PISSN: 10637745     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

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5. V. V. Martynov and Yu. Platonov, Rev. Sci. Instrum. 73, 1551 (2002).