Field emission characteristics of defect-controlled polyimide tunneling cathode

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 3, 2004, Pages 1353-1357

  Baba, Akiyoshi ^a   Yoshida, Tomoya ^a   Asano, Tanemasa ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRON EMISSION; ELECTRON SCATTERING; ELECTRON TUNNELING; FIELD EMISSION DISPLAYS; PHOTORESISTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYIMIDES; SILICA; THIN FILMS;

ELECTRODE INTERCONNECTION; ENERGY DISTRIBUTION; ION-BEAM IRRADIATION; TUNNELING GATE MATERIAL;

CATHODES;

EID: 3242674369     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1752901     Document Type: Conference Paper

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