Thin transparent pin-photodiodes for length measurements

Sensors and Actuators, A: Physical

Volumn 113, Issue 3, 2004, Pages 334-337

  Bunte, E ^a   Mandryka, V ^b   Jun, K H ^a   Buchner H J ^b   Jager G ^b   Stiebig, H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Amorphous silicon; Interferometer; Standing wave; Transparent photodetector

Indexed keywords

AMORPHOUS SILICON; DEPOSITION; INTERFEROMETERS; LASER BEAMS; PHASE SHIFT; PHOTOCURRENTS; QUANTUM EFFICIENCY; SIGNAL INTERFERENCE; SUBSTRATES;

FRINGE COUNTING; OPTICAL AXIS; STANDING WAVE; TRANSPARENT PHOTODETECTOR;

PHOTODIODES;

EID: 3242668705     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.067     Document Type: Article

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