Low-temperature processing and properties of nanocrystalline-SiC/crystalline Si heterojunction devices

Solid-State Electronics

Volumn 50, Issue 2, 2006, Pages 209-213

  Colder, H ^a   Rizk, R ^a   Pichon, L ^b   Bonnaud, O ^c  

^a CNRS   (France)

^b Centre National de la Recherche Scientifique   (France)

^c IETR   (France)

Author keywords

Heterojunction; Nanocrystalline SiC

Indexed keywords

ANNEALING; DIFFUSION; DIODES; HETEROJUNCTIONS; LEAKAGE CURRENTS; LOW TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SILICON;

HYDROGEN-RICH PLASMA; NANOCRYSTALLINE-SIC;

SILICON CARBIDE;

EID: 32344438482     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2005.12.012     Document Type: Article

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