Uncooled 160×120 microbolometer IR FPA based on sol-gel VO X

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5957, Issue , 2005, Pages 1-8

  Dem'yanenko, Michael A ^a   Fomin, Boris I ^a   Ovsyuk, Victor N ^a   Marchishin, Igor V ^a   Parm, Igor O ^a   Vasil'ieva, Lyudmila L ^a   Shashkin, Valeri V ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

Focal plane array; Microbolometer; Silicon nitride; Sol gel technology; Vanadium oxides

Indexed keywords

OXIDES; SENSORS; SIGNAL PROCESSING; SOL-GELS; THERMAL EFFECTS; VANADIUM COMPOUNDS;

FOCAL PLANE ARRAYS (FPA); MICROBOLOMETER; VANADIUM OXIDES;

BOLOMETERS;

EID: 32344433622     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.624670     Document Type: Conference Paper

References (6)

1. Rogalski A, Infrared detectors, pp.64-152, Singapore: Gordon and Breach Science Publishers, 2000.
2. x uncooled IR focal plane", Proc. SPIE, 4721, pp. 48-55, 2002.
3. E. Mottin, A. Bain, J.-L. Martin, J.-L. Ouvrier-Buffet, S. Bisotto, J.-J. Yon, J.-L. Tissot, "Uncooled amorphous silicon technology enhancement for 25-μm pixel pitch achievement", Proc. SPIE, 4820, pp. 200-207, 2003.
4. D. F. Murphy, M. Ray, R. Wyles, J. F. Asbrock, N. A. Lum, J. Wyles, C. Hewitt, A. Kennedy, D. V. Lue, J. S. Anderson, D. Bradley, R. Chin, T. Kostrzewa, "High-sensitivity 25-μm microbolometer FPAs", Proc. SPIE, 4820, pp. 208-219, 2003.
5. G. Guzman, R. Morineau and J. Livage, "Synthesis of vanadium dioxide thin films from vanadium alkoxides", Materials Research Bulletin, 5, N 5, pp. 509-515, 1994.
6. W.J. Parish, J.T. Woolaway, G. Kincaid et al., "Low cost 160×120 uncooled infrared sensor array", Proc. SPIE, 3360, pp. 111-119, 1998.