PECVD as an effective tool for thin film encapsulation of OLED displays

International Display Manufacturing Conference and Exhibition, IDMC'05

Volumn , Issue , 2005, Pages 388-389

  Lifka, H ^a   Rosink, J J W M ^a   Van Esch, H A ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DISPLAY DEVICES; LIGHT EMITTING DIODES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; SILICON NITRIDE; SUBSTRATES;

OLED DISPLAYS; THIN FILM ENCAPSULATIONS; THIN FILM PACKAGING; WATER PERMEABILITY;

THIN FILMS;

EID: 32244443486     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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