Digital two-wavelength holographic interference microscopy for surface roughness measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5945, Issue , 2005, Pages 1-8

  Ohlídal, Miloslav ^a   Šír, Luděk ^a   Jákl, Miloš ^a   Ohlídal, Ivan ^b  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^b MASARYK UNIVERSITY   (Czech Republic)

Author keywords

Digital two wavelength holographic interference microscopy; Surface roughness measurement

Indexed keywords

HOLOGRAMS; HOLOGRAPHIC INTERFEROMETRY; NUMERICAL ANALYSIS; OPTICAL INSTRUMENTS; OPTICAL MICROSCOPY; PARAMETER ESTIMATION;

DIGITAL TWO-WAVELENGTH HOLOGRAPHIC INTERFERENCE MICROSCOPY; SURFACE ROUGHNESS MEASUREMENTS; SURFACE ROUGHNESS PARAMETERS; SYNTHETIC WAVELENGTHS;

ROUGHNESS MEASUREMENT;

EID: 31844448303     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.638915     Document Type: Conference Paper

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