Wafer bonding for optical mems

Proceedings - Electrochemical Society

Volumn PV 2005-02, Issue , 2005, Pages 184-193

  Bakke, T ^a   Volker B ^a   Schenk, H ^a   Radu, I ^b   Reiche, M ^b  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CRYSTALLINE MATERIALS; FUSED SILICA; LIGHT MODULATION; OPTICAL SYSTEMS; SURFACE ROUGHNESS;

INTERFACE DEFECTS; TRANSFER LAYERS; WAFER BONDING;

MICROELECTROMECHANICAL DEVICES;

EID: 31844444466     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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