Addressing the environmental challenges of the NIST Advanced Measurement Laboratory

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5933, Issue , 2005, Pages 1-13

  Soueid, Ahmad ^a   Amick, Hal ^b   Zsirai, Theodore ^a  

^a HDR Architecture Inc   (United States)

^b Colin Gordon and Associates ^*  (United States)

Author keywords

Humidity control; Laboratory design; Metrology laboratories; Nanotechnology; Temperature stability; Vibration control

Indexed keywords

HUMIDITY CONTROL; NANOTECHNOLOGY; SOCIETIES AND INSTITUTIONS; TEMPERATURE CONTROL; THERMODYNAMIC STABILITY;

LABORATORY DESIGN; METROLOGY LABORATORIES; TEMPERATURE STABILITY;

ENVIRONMENTAL IMPACT;

EID: 31744440466     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.618915     Document Type: Conference Paper

References (11)

1. Institute of Environmental Sciences (IEST), Appendix C in Recommended Practice RP-012, "Considerations in Clean Room Design," IES-RP-CC012.2, Institute of Environmental Sciences, Rolling Meadows, IL, 2005
2. H. Amick, M. Gendreau, T. Busch, and C. Gordon, "Evolving criteria for research facilities I: vibration," Proc. Intl. Soc. for Opt. Engng. (SPIE), Vol. 5933: Buildings for Nanoscale Research and Beyond, San Diego, CA, 31 Jul 2005 to 1 Aug 2005
3. H. Amick and S. Bui, "A Review of Several Methods for Processing Vibration Data," Proc. Intl. Soc. for Opt. Engng. (SPIE), Vol. 1619 (Nov. 1991).
4. H. Amick, B. Sennewald, N. C. Pardue, C. Teague, and B. Scace, "Analytical/Experimental Study of Vibration of a Room-Sized Airspring-Supported Slab," Noise Control Engrng. J., March/April 1998, Vol. 46, no. 2, pp. 39-47.
5. C. H. Amick, Concrete Damping Properties and their Modification, dissertation in partial satisfaction of Doctor of Philosophy, University of California, Berkeley, 2005, 396 pp.
6. H. Amick, "Modification of concrete damping properties for vibration control in technology facilities," Proc. Intl. Soc. for Opt. Engng. (SPIE), Vol. 5933: Buildings for Nanoscale Research and Beyond, San Diego, CA, 31 Jul 2005 to 1 Aug 2005
7. rd ICEGE), 7-9 January, 2004, Berkeley, CA.
8. Zsirai, T., Williams, S., and Sennewald, B. (1997). "Researchers Seek Strategies for Metrology Lab Temperature Control," Lab. Design
9. Richart, F. E., Hall, J. R., and Woods, R. D. (1969), Vibration of Soil and Foundations, Prentice-Hall, Englewood Cliffs, NJ
10. H. Amick and A. Bayat, "Meeting The Vibration Challenges Of Next-Generation Photolithography Tools," Proc. ESTECH 2001, 47th Annual Technical Meeting, IEST, Phoenix, Arizona (April 2001)
11. Amick, H., M. Gendreau, and T. Xu, "On the Appropriate Timing for Facility Vibration Surveys," Semiconductor Fabtech, No. 25, March 2005, Cleanroom Section