Dimension dependence of the thermomechanical noise of microcantilevers

Journal of Applied Physics

Volumn 99, Issue 2, 2006, Pages

  Alvarez, M ^a   Tamayo, J ^a   Plaza, J A ^b   Zinoviev, K ^b   Dominguez C ^b   Lechuga, L M ^a  

^a ISAAC NEWTON GROUP OF TELESCOPES   (Spain)

^b CSIC   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

MICROCANTILEVERS; QUALITY FACTOR; SINGLE-CRYSTALLINE SILICON; THERMOMECHANICAL NOISE;

ATOMIC FORCE MICROSCOPY; RESONANCE; SILICON; SINGLE CRYSTALS; STRESS ANALYSIS; STRESSES; SURFACE PROPERTIES;

THERMAL NOISE;

EID: 31644448479     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2164537     Document Type: Article

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