Surface structures tailoring of hexamethyldisiloxane films by pulse rf plasma polymerization

Materials Chemistry and Physics

Volumn 96, Issue 2-3, 2006, Pages 498-505

  Wang, Ying ^a   Zhang, Jing ^a   Shen, Xinyuan ^a  

^a DONGHUA UNIVERSITY   (China)

Author keywords

Hexamethyldisiloxane film; Plasma polymerization; Pulse rf discharge; Surface structures

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; NUCLEAR MAGNETIC RESONANCE; PLASMA POLYMERIZATION; SCANNING ELECTRON MICROSCOPY; SURFACE PHENOMENA;

HEXAMITHYLDISILOXANE FILMS; PLASMA RF DISCHARGE; SURFACE STRUCTURES;

THIN FILMS;

EID: 31644441922     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2005.07.042     Document Type: Article

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