Measuring ultra-precision freeform surfaces using a robust form characterization method

Measurement Science and Technology

Volumn 17, Issue 3, 2006, Pages 488-494

  Cheung, C F ^a   Li, Huifen ^a,b   Kong, Lingbao ^a   Lee, W B ^a   To, S ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Advanced optics; Form characterization; Freeform surfaces; Robust estimation; Ultra precision machining

Indexed keywords

COMPUTER SIMULATION; MICROMETERS; OPTICAL ENGINEERING; OPTICAL PROPERTIES; OPTICS; PRECISION ENGINEERING; SURFACE PROPERTIES;

ADVANCED OPTICS; FORM CHARACTERIZATION; FREEFORM SURFACES; ROBUST ESTIMATION; ULTRA-PRECISION MACHINING;

SURFACE CHEMISTRY;

COMPUTER SIMULATION; MICROMETERS; OPTICAL ENGINEERING; OPTICAL PROPERTIES; OPTICS; PRECISION ENGINEERING; SURFACE PHENOMENA;

EID: 31644433920     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/3/S05     Document Type: Article

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