Estimation of parasitic capacitance in measurement of hysteresis properties of ferroelectric microcapacitors using scanning probe microscope

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 11, 2005, Pages 8062-8065

  Okamura, Soichiro ^a   Iwase, Takuma ^b   Takeda, Hiroaki ^b   Nishida, Takashi ^b   Shiosaki, Tadashi ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Compensation; Ferroelectric; Hysteresis; Microcapacitor; Parasitic capacitance; SPM

Indexed keywords

CAPACITORS; COERCIVE FORCE; FERROELECTRIC DEVICES; HYSTERESIS; LEAD COMPOUNDS; POLARIZATION;

COMPENSATION; MICROCAPACITOR; PARASITIC CAPACITANCE; SPM;

CAPACITANCE;

EID: 31544452251     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.8062     Document Type: Article

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