Fabrication of photonic crystals using a spin-coated hydrogen silsesquioxane hard mask

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 336-339

  O'Faolain, L ^a   Kotlyar, M V ^a   Tripathi, N ^a   Wilson, R ^a   Krauss, T F ^a  

^a UNIVERSITY OF ST ANDREWS   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; DRY ETCHING; FABRICATION; HYDROGEN INORGANIC COMPOUNDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; SPIN COATING;

MICROPHOTONIC STRUCTURES; PHOTONIC CRYSTALS;

PHOTONS;

EID: 31544448323     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2164850     Document Type: Article

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