Effect of poling conditions on out-of-plane displacement for a shear mode PZT actuator

Sensors and Actuators, A: Physical

Volumn 126, Issue 2, 2006, Pages 386-395

  Cheng, C H ^a   Chen, S C ^b   Young, S W ^a,c   Su, Y R ^a   Lin, Y C ^b,d  

^a DA YEH UNIVERSITY   (Taiwan)

^b NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^d MINISTRY OF ECONOMIC AFFAIRS   (Taiwan)

Author keywords

Actuator; FEM; Out of plane displacement; Poling; PZT; Shear mode

Indexed keywords

ACTUATOR; OUT-OF-PLANE DISPLACEMENT; POLING; PZT; SHEAR MODE;

COUPLED CIRCUITS; DESIGN FOR TESTABILITY; FABRICATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; POLES;

ACTUATORS;

EID: 31544447453     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.10.036     Document Type: Article

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