Characteristics of xenon capillary Z-pinch extreme ultraviolet lithography source driven by different dI/dt discharge current pulses

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 12, 2005, Pages 8640-8645

  Song, Inho ^a   Iwata, Kazuhiro ^a   Homma, Yusuke ^a   Mohanty, Smruti Ranjan ^b   Watanabe, Masato ^a   Kawamura, Toru ^a   Okino, Akitoshi ^a   Yasuoka, Koichi ^a   Horioka, Kazuhiko ^a   Hotta, Eiki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b Centre of Plasma Physics   (India)

Author keywords

Capillary Z pinch; Discharge current dI dt; Extreme ultraviolet; Lithography

Indexed keywords

CALORIMETERS; CAMERAS; CAPILLARY FLOW; ELECTRIC DISCHARGES; PHOTODIODES; PINCH EFFECT; SPECTROMETERS; ULTRAVIOLET RADIATION; XENON;

CAPILLARY Z-PINCH; DISCHARGE CURRENT DI/DT; EXTREME ULTRAVIOLET; WAVELENGTH;

PHOTOLITHOGRAPHY;

EID: 31544437707     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.8640     Document Type: Article

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