Methods for fabricating Ohmic contacts to nanowires and nanotubes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 231-236

  Stern, E ^a   Cheng, G ^a   Klemic, J F ^a   Broomfield, E ^a   Turner Evans, D ^a   Li, C ^b   Zhou, C ^b   Reed, M A ^a,c  

^a Yale University   (United States)

^b Mail Code 1455 ^*  (United States)

^c YALE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METAL-SEMICONDUCTOR CONTACTS; SEMICONDUCTOR NANOWIRES;

CARBON NANOTUBES; ELECTRON BEAM LITHOGRAPHY; METALLIZING; NANOSTRUCTURED MATERIALS; SEMICONDUCTING GALLIUM COMPOUNDS;

OHMIC CONTACTS;

EID: 31544436660     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2162575     Document Type: Article

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