|
Volumn 268, Issue 3-4 SPEC. ISS., 2004, Pages 369-374
|
Selective growth of GaAs quantum dots on the triangle nanocavities bounded by SiO2 mask on Si substrate by MBE
|
Author keywords
A1. Atomic force microscopy; A3. Molecular beam epitaxy; B1. Quantum dots; B2. Semiconducting III V materials
|
Indexed keywords
ATOMIC FORCE MICROSCOPY;
INTEGRATED CIRCUITS;
MOLECULAR BEAM EPITAXY;
NANOSTRUCTURED MATERIALS;
OPTOELECTRONIC DEVICES;
PHOTOLITHOGRAPHY;
SEMICONDUCTING GALLIUM ARSENIDE;
SILICA;
SURFACE TREATMENT;
NANOCAVITIES;
SUBSTRATE SURFACE;
SEMICONDUCTOR QUANTUM DOTS;
|
EID: 3142762419
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2004.04.056 Document Type: Conference Paper |
Times cited : (14)
|
References (24)
|