Experimental study for ion beam sputtering deposition of Ta2O5 optical thin film

Guangdian Gongcheng/Opto-Electronic Engineering

Volumn 31, Issue 3, 2004, Pages 41-43+55

  Liu, Hong Xiang ^a   Xiong, Sheng Ming ^a   Li, Ling Hui ^a   Zhang, Yun Dong ^a  

^a INSTITUTE OF OPTICS AND ELECTRONICS   (China)

Author keywords

Ion added deposition; Ion beam sputtering; Optical properties; Optical thin film

Indexed keywords

EID: 3142746876     PISSN: 1003501X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)