Fabrication and properties of InSb films with ion-beam sputtering for use in the amplification of magneto-surface-acoustic waves

Physica Status Solidi (A) Applied Research

Volumn 201, Issue 8, 2004, Pages 1973-1975

  Obata, N ^a   Kawahata, T ^a   Suzuki, R ^a   Nishimura, K ^a   Uchida, H ^a   Inoue, M ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; ANNEALING; ATTENUATION; INDIUM COMPOUNDS; ION BEAMS; MAGNETIC FIELDS; SPUTTERING; SUBSTRATES; SURFACE WAVES;

BUFFER LAYERS; EDDY CURRENT LOSS; ION BEAM SPUTTERING;

THIN FILMS;

EID: 3142710967     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200304681     Document Type: Conference Paper

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