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Volumn 161-163, Issue , 2000, Pages 227-230
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New high-precision 5-axes RBS/channeling goniometer for ion beam analysis of 150 mm Ø wafers
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Author keywords
Channeling; Goniometer; Ion beam analysis; Manipulator; UHV
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Indexed keywords
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EID: 3142707834
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(99)00747-8 Document Type: Article |
Times cited : (29)
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References (4)
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