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Volumn 26, Issue 3, 2004, Pages 135-139

Image signal-to-noise ratio estimation using the autoregressive model

Author keywords

Autoregressive model; Noise; Parameter estimation; Scanning electron microscope; Signal to noise ratio

Indexed keywords

INTERPOLATION; MATHEMATICAL MODELS; PROBLEM SOLVING; SCANNING ELECTRON MICROSCOPY; SIGNAL TO NOISE RATIO;

EID: 3142705680     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950260306     Document Type: Article
Times cited : (32)

References (7)
  • 1
    • 0020462975 scopus 로고
    • Reduction of noise in TV rate electron microscope images by digital filtering
    • Erasmus SJ: Reduction of noise in TV rate electron microscope images by digital filtering. J Microsc 127 (Pt. 1), 29-37 (1982)
    • (1982) J Microsc , vol.127 , Issue.PART 1 , pp. 29-37
    • Erasmus, S.J.1
  • 2
    • 0016789772 scopus 로고
    • Signal-to-noise ratio of electron micrographs obtained by cross correlation
    • Frank J, Al-Ali L: Signal-to-noise ratio of electron micrographs obtained by cross correlation. Nature 256, 376-379 (1975)
    • (1975) Nature , vol.256 , pp. 376-379
    • Frank, J.1    Al-Ali, L.2
  • 3
    • 0003837292 scopus 로고    scopus 로고
    • John Wiley, Hoboken
    • Hayes MH: Statistical Digital Signal Processing and Modeling. John Wiley, Hoboken (1996) Joy DC, Ko YU, Hwu JJ: Metrics of resolution and performance for CD-SEMs in metrology inspection and process control for microlithography XIV. Proc SPIE 3998, 108-115 (2000)
    • (1996) Statistical Digital Signal Processing and Modeling
    • Hayes, M.H.1
  • 4
    • 0033705459 scopus 로고    scopus 로고
    • Metrics of resolution and performance for CD-SEMs in metrology inspection and process control for microlithography XIV
    • Hayes MH: Statistical Digital Signal Processing and Modeling. John Wiley, Hoboken (1996) Joy DC, Ko YU, Hwu JJ: Metrics of resolution and performance for CD-SEMs in metrology inspection and process control for microlithography XIV. Proc SPIE 3998, 108-115 (2000)
    • (2000) Proc SPIE , vol.3998 , pp. 108-115
    • Joy, D.C.1    Ko, Y.U.2    Hwu, J.J.3
  • 5
    • 0033705459 scopus 로고    scopus 로고
    • Metrics of resolution and performance for CD-SEMs in metrology inspection and process control for microlithography XIV
    • Joy DC, Ko YU, Hwu JJ: Metrics of resolution and performance for CD-SEMs in metrology inspection and process control for microlithography XIV. Proc SPIE 3998, 108-115 (2000)
    • (2000) Proc SPIE , vol.3998 , pp. 108-115
    • Joy, D.C.1    Ko, Y.U.2    Hwu, J.J.3
  • 7
    • 0034802275 scopus 로고    scopus 로고
    • Single-image signal to noise ratio estimation
    • Thong JTL, Sim KS, Phang JCH: Single-image signal to noise ratio estimation. Scanning 23, 328-336 (2001)
    • (2001) Scanning , vol.23 , pp. 328-336
    • Thong, J.T.L.1    Sim, K.S.2    Phang, J.C.H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.