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Volumn 27, Issue 8, 2004, Pages 87-92
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Porous low-k materials and effective k
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC POLARIZABILITY;
COEFFICIENT OF THERMAL EXPANSION (CTE);
DIELECTRIC SPACERS;
SIDEWALL DAMAGES;
ADHESION;
CAPACITANCE;
CHEMICAL VAPOR DEPOSITION;
COMPUTER SIMULATION;
ELECTRON ENERGY LOSS SPECTROSCOPY;
ETCHING;
FLUORINE;
HARDNESS;
INTEGRATED CIRCUITS;
MATHEMATICAL MODELS;
ORGANIC POLYMERS;
PERMITTIVITY;
POROSITY;
POROUS MATERIALS;
SILICA;
THERMAL CONDUCTIVITY;
DIELECTRIC FILMS;
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EID: 3142680762
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Review |
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Times cited : (8)
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References (0)
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