Thin film synthesis with ultrafast lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3269, Issue , 1998, Pages 46-56

  Pronko, Peter P ^a   VanRompay, Paul A ^a   Sato, Shunichi ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Ablation plasmas; Avalanche ionization; Ion energies; Plume dynamics; Thin films; Ultrafast

Indexed keywords

ABLATION; ABSORPTION SPECTROSCOPY; ATOMIC FORCE MICROSCOPY; DEPOSITION; III-V SEMICONDUCTORS; ION BEAMS; IONS; LASER MATERIALS PROCESSING; LIGHT ABSORPTION; OPTICAL PROPERTIES; SPECTROSCOPIC ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY; ULTRAFAST LASERS;

ABLATION PLASMA; AVALANCHE IONIZATION; ION ENERGIES; PLUME DYNAMICS; ULTRA-FAST;

THIN FILMS;

EID: 3142658931     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.312331     Document Type: Conference Paper

References (9)

1. . P.P. Pronko, P.A. VanRompay, R.K. Singh, F. Qian, D. Du, and X. Liu, "Laser Induced Avalanche Ionization and Electron-Lattice Heating of Silicon with Intense Near JR Femtosecond Pulses", Mat. Res. Soc. Symp. Proc. 12, p. 45, 1996.
2. P.P. Pronko, P.A. VanRompay, C. Horvath, X. Liu, T. Juhasz, and G. Mourou, "Avalanche Ionization and Dielectric Breakdown in Silicon with Ultrafast Laser Pulses", submitted to Phys. Rev., 1998.
3. H. Hora, Plasmas at High Temperature and Density, Lecture Notes in Physics (ml), Springer Verlag, Berlin, 1991.
4. P.A. VanRompay, M. Nantel, and P.P. Pronko, "Carbon Jon Charge States and Energy Distributions for DLC Ablation Plumes from 100-fs, 780-nm Laser Pulses", E-MRS Conference, Strasbourg, France, June 1997 and accepted for publication in Surface and Coatings Technology.
5. P.A. VanRompay, M. Nantel, and P.P. Pronko, "Pulse-Contrast Effects on Energy Distributions of C'+ to C4 Ions in High-Jntensity 100-fs Laser Ablation Plasmas", 4th Jnternational Conference on Laser Ablation (COLA '97), Asilomar, CA, July 1997 and accepted for publication in Applied Surface Science.
6. P.B. Mirkarimi, K.F. McCarty, and D.L. Medlin, "Review ofAdvances in Cubic Boron Nitride Film Synthesis", to be published in Materials Science and Engineering Reports.
7. F. Qian, R.K. Singh, S.K. Dutta, and P.P. Pronko, "Laser Deposition of Diamond-Like Carbon Films at High Jntensity",Appl. Phys. Lett. 67,p. 3120, 1995.
8. F. Qian, R.K. Singh, S. Dutta, P.P. Pronko, W.H. Weber, "Femtosecond Laser Deposition of Diamond-Like Carbon Films", Mat. Res. Soc. Symp. Proc. 397, p. 297, 1996.
9. O. Stenzel, J. Hahn, M. Roder, A. Ehrlich, S. Prause, and F. Richter, "The Optical Constants of Cubic and Hexagonal Boron Nitride Thin Films and Their Relation to the Bulk Optical Constants", Phys. Stat. Sol. (a) 158, p. 281, 1996.