Fabrication of short channel organic thin film transistors by Si-etching method

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 768-770

  Chen, Y ^a   Zhu, W W ^a   Xiao, S ^b   Shih, I ^a  

^a MCGILL UNIVERSITY   (Canada)

^b Organic Vision Inc   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ETCHING; LIGHT EMITTING DIODES; ORGANIC POLYMERS; PERMITTIVITY; PHOTOLITHOGRAPHY; SILICA; SPIN COATING;

FIELD EFFECT MOBILITY; GATE INSULATORS; ORGANIC THIN FILM TRANSISTORS (OTFTS); VACUUM EVAPORATION;

THIN FILM TRANSISTORS;

EID: 3142613962     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1722455     Document Type: Conference Paper

References (6)

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