Electrokinetic movement of micro-objects in fluids using microelectromechanical system electrode arrays

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 831-836

  Ellerington, Nell ^a   Hubbard, Ted ^a   Kujath, Marek ^a  

^a DALHOUSIE UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTATIONAL METHODS; COMPUTER SIMULATION; DIFFUSION IN LIQUIDS; ELECTRIC FIELDS; ELECTROOSMOSIS; FLOW OF FLUIDS; MATHEMATICAL MODELS; PARAMETER ESTIMATION; PERMITTIVITY; TRANSPORT PROPERTIES; VELOCITY MEASUREMENT;

DIELECTROPHORESIS (DEP); MICRO-OBJECTS; NONUNIFORM ELECTRIC FIELDS; PLANAR CONTROL;

MICROELECTROMECHANICAL DEVICES;

EID: 3142613953     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1705585     Document Type: Conference Paper

References (8)

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7. L. J. Heyderman, D. Bachle, F. Glaus, B. Ketterer, H. Schift, C. David, J. Gobrecht (PSI), B. P. Cahill, and A. Stemmer (ETHZ), PSI Annual Report (2001).
8. D. A. Koester, R. Mahadevan, B. Hardy, and K. W. Markus, MUMP Design Handbook, revision 7.0, Cronos Integrated Microsystems, A JDS Uniphase Company, 3026 Cornwallis Rd., Research Triangle Park, NC 27709.