Extreme-ultraviolet efficiency measurements of freestanding transmission gratings

Applied Optics

Volumn 43, Issue 19, 2004, Pages 3797-3801

  McMullin, Donald R ^a   Judge, Darrell L ^a   Tarrio, Charles ^b   Vest, Robert E ^b   Hanser, Fred ^c  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c GENERAL ELECTRIC COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARS (METAL); GOLD; LIGHT POLARIZATION; PHOTOLITHOGRAPHY; PHOTONS; REFLECTION; ULTRAVIOLET RADIATION;

GRATING EFFICIENCY; PERIOD GRATINGS; TRANSMISSION EFFICIENCY GRATINGS;

DIFFRACTION GRATINGS;

EID: 3142609593     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.003797     Document Type: Article

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17. Disclaimer: Companies and commercial products are mentioned only to provide a complete description of measurement methods. Mention of brand names and products does not constitute endorsement by NIST or the U.S. government.
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