|
Volumn 15, Issue 4, 2004, Pages 381-384
|
P-nc-Si:H film materials and its application in microcrystalline silicon solar cells
|
Author keywords
Microcrystalline silicon; Nano; RF PECVD; Solar cell; VHF PECVD
|
Indexed keywords
CRYSTALLINE MATERIALS;
ELECTRIC CONDUCTIVITY;
NANOSTRUCTURED MATERIALS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SILICON SOLAR CELLS;
DARK CONDUCTIVITY;
DOPING CONCENTRATION;
MICROCRYSTALLINE SILICON;
PHOTO CONDUCTIVITY;
SEMICONDUCTING FILMS;
|
EID: 3142603230
PISSN: 10050086
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (12)
|
References (9)
|