Micro bubbles captured at micro defect on resist film

Journal of Photopolymer Science and Technology

Volumn 17, Issue 1, 2004, Pages 105-106

  Endo, Hotaka ^a   Kawai, Akira ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Adhesion; Micro bubble; Micro defect; Pinning effect buoyancy; Surface energy

Indexed keywords

ADHESION; CONFERENCE PAPER; ENERGY; FILM; LIQUID; MATERIAL STATE; METHODOLOGY; MICROSCOPY; PROCESS DEVELOPMENT; QUALITY CONTROL; SURFACE PROPERTY; THICKNESS;

EID: 3142582520     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.17.105     Document Type: Conference Paper

References (3)

1. th Spring Meet. Japan Society of Applied Physics and Related Societies, Tokyo, March, (2004) 777, No.29a-G-9.
2. F. M. Fowks, Ind. Eng. Chem., 56 (1964) 40.
3. D. H. Kaelble, J. Appl. Polym. Sci., 18 (1974) 1869.