Nano patterning on optical fiber and laser diode facet with dry resist

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 3, 2004, Pages 743-746

  Kelkar, P S ^a   Beauvais, J ^a   Lavallee E ^b   Drouin, D ^b   Cloutier, M ^b   Turcotte, D ^b   Yang, Pan ^b   Mun, Lau Kien ^b   Legario, R ^b   Awad, Y ^b   Aimez, V ^a  

^a UNIVERSITÉ DE SHERBROOKE   (Canada)

^b Quantiscript Inc   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; LITHOGRAPHY; MICROELECTRONICS; MOLECULAR DYNAMICS; NANOTECHNOLOGY; OPTOELECTRONIC DEVICES; POLYMETHYL METHACRYLATES; SEMICONDUCTOR LASERS; SPIN COATING; SUBSTRATES; SURFACE TENSION; THICK FILMS; VISCOSITY;

ETCH RESISTANT POLYMER; SCATTERED RADIATION; THERMAL EVAPORATION; VACUUM EVAPORATION;

OPTICAL FIBERS;

EID: 3142539587     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1667503     Document Type: Conference Paper

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